Year | 2014 |
---|---|
Authors | Chiu, Yi |
Paper Title | “Assembly of 3D MEMS mirrors and scanners using compliant push pads,” Y. Chiu, Y.-T. Wu, and H.-C. Hong, Optical MEMS and Nanophotonics 2013, Japan, 27-8 (2013). |
Date of Publication | 2014-05-19 |
Login Institute of Electrical and Control Engineering, NYCU
Year | 2014 |
---|---|
Authors | Chiu, Yi |
Paper Title | “Assembly of 3D MEMS mirrors and scanners using compliant push pads,” Y. Chiu, Y.-T. Wu, and H.-C. Hong, Optical MEMS and Nanophotonics 2013, Japan, 27-8 (2013). |
Date of Publication | 2014-05-19 |