Year | 2011 |
---|---|
Authors | Chiu, Yi |
Paper Title | “Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation,” Y. Chiu, W.-Z. Huang, C.-S. Wu, and C.-A. Lin, 台灣光電科技研討會 (OPT), 2008. |
Date of Publication | 2011-07-26 |
Login Institute of Electrical and Control Engineering, NYCU
Year | 2011 |
---|---|
Authors | Chiu, Yi |
Paper Title | “Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation,” Y. Chiu, W.-Z. Huang, C.-S. Wu, and C.-A. Lin, 台灣光電科技研討會 (OPT), 2008. |
Date of Publication | 2011-07-26 |