Year	2011
Authors	Chiu, Yi
Paper Title	“Batch assembly of three dimensional microstructures on SOI wafers using SU-8 mechanisms and vertical one-push operation,” C.-A. Lin, C.-S. Wu, W.-Z. Huang, and Y. Chiu, 第十三屆奈米工程暨微系統技術研討會, 2009.
Date of Publication	2011-07-26