Year	2014
Authors	Chiu, Yi
Paper Title	“Design and fabrication of a near-field scanning optical microscope probe by CMOS-MEMS,” C.H. Liou, Y. Chiu, H.P. D. Shieh, and J.C. Chiou, Optical MEMS and Nanophotonics 2012, Canada, 168-9 (2012).
Date of Publication	2014-05-19