Year	2011
Authors	Chiu, Yi
Paper Title	“Integration of SOI and SU-8 in a surface-micromachining-like process and its application in micro-optical systems,” Y. Chiu, C-W. Wu, Z-W. Zhuang, J-C. Chiou, and H-P. D. Shieh, IEEE/LEOS Optical MEMS 2006, USA, 140-1 (2006).
Date of Publication	2011-07-26