Year	2011
Authors	Chiu, Yi
Paper Title	“Micro knife-edge optical measurement devices fabricated by SOI and CMOS MEMS processes,” T-L. Chang, V. F-G. Tseng, and Y. Chiu, IEEE/LEOS Optical MEMS and Nanophotonics 2007, Taiwan, 31-32 (2007).
Date of Publication	2011-07-26