Year	2015
Authors	Chiou, Jin-Chern
Paper Title	J. C. Chiou, C. C. Hung, L. J. Shieh and Z. L. Tsai, “CMOS-MEMS based optical phase shifter array with high fill factor,” Proceedings of the IEEE/LEOS Optical MEMS and Nanophotonics 2009, Clearwater beach, FL, USA, August 16-20, 2009.
Date of Publication	2015-06-12