Year 2015
Authors Chiou, Jin-Chern
Paper Title

Y. C. Hu, C. H. Chiang, K. H. Chen, C. T. Chiu, C. T. Chuang, W. Hwang, J.-C. Chiou, H. M. Tong, K. N. Chen, Micro-masking Removal of TSV and Cavity during ICP Etching Using Parameter Control in 3D and MEMS Integrations, The 7th IMPACT 2012 Conference, Taipei, Taiwan, Oct 24-26, 2012

Date of Publication 2015-06-12