Year	2011
Authors	Chiu, Yi
Paper Title	“Microlens array fabrication by excimer laser micromachining with gray-tone photolithography,” C-H. Tien, Y-E. Chieh, Y. Chiu, and H-P. D. Shieh, Jpn. J. Appl. Phys., 42(3), 1280-3 (2003).
Date of Publication	2011-07-29