Year | 1996 |
---|---|
Authors | OU-YANG, MANG ,B. C. S. Chou*, Y. M. Chen, Mang Ou-Yang, and J. S. Shie |
Paper Title | A sensitive pirani vacuum sensor and the electrothermal SPICE modelling |
Journal Title | Sensors and Actuators A |
Vol.No | 53 |
Issue.No | 1-3 |
From | 273 |
To | 277 |
Language | English |