Year	2012
Authors	Chiou, Jin-Chern
Paper Title	J. C. Chiou*, L. J. Shieh, and Y. J. Lin, “CMOS-MEMS Prestress Vertical Cantilever Resonator with Electrostatic Driving and Piezoresistive Sensing,” Journal of Physics D: Applied Physics, Vol. 41, No. 20, 2008, p. 205102. (97-2220-E-009-026) (EI, SCI, IF = 2.200, N/M = 15/94)
Date of Publication	2012-12-05