Year | 2012 |
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Authors | Chiou, Jin-Chern |
Paper Title | J. C. Chiou*, and C. F. Kuo, “Development of Vertical Electrostatic Comb-drive Actuator Using Magnified Cascade Configuration,” Japanese Journal of Applied Physics, Vol. 46, No. 10A, 2007, pp. 6546-6549. (96-2218-E-009-001) (EI, SCI, IF = 1.222, N/M = 39/84) |
Date of Publication | 2012-12-05 |