年度 2011
全部作者 邱 一
论文名称 “Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation,” Y. Chiu, W.-Z. Huang, J.-W. Wu, J.-C. Chiou, and H.-P. D. Shieh, IEEE/LEOS Optical MEMS and Nanophotonics, Germany, 110-1 (2008).
发表日期 2011-07-26