Year	2011
Authors	Chao, Chang-Po
Paper Title	Chih-Kuo Chang and Paul C.-P. Chao, “Hybrid High Sensitivity MEMS Microphone Fabrication Processes,” The 14th North-East Asia Symposium on Nano, Information Technology and Reliability, Hsinchu, Taiwan, May 15, 2009.
Date of Publication	2011-08-03