Year 2011
Authors Chao, Chang-Po
Paper Title Lun-De Liao, Paul C.-P. Chao*, Chi-Wei Chiu, Yu-Jhu Lin, Shaou-Gang Miaou, Ming Chang and Jeng-Sheng Huang, 2008, “Precision Nano-machining in a Scanning Electron Microscope by Run-to-Run Control Based on Image Feedbacks,” The 34th International Conference on Micro and Nano Engineering, Hilton Athens, Greece, Sep. 15-18, 2008.
Date of Publication 2011-08-03