Year 2011
Authors Chao, Chang-Po
Paper Title Chun-Yin Tsai, Chi-Wei Chiu and Paul C.-P. Chao*, 2009, “Reliable hybrid fabrication processes for high sensitivity MEMS microphone,” Microelectronic Engineering, accepted for publication. (SCI Journal, Impact Factor =1.503, NSC96-2220-E-009-029 and 96-2622-E-009-010-CC3)
Date of Publication 2011-08-03