年度	2011
全部作者	赵昌博
论文名称	Chih-Kuo Chang and Paul C.-P. Chao, “Hybrid High Sensitivity MEMS Microphone Fabrication Processes,” The 14th North-East Asia Symposium on Nano, Information Technology and Reliability, Hsinchu, Taiwan, May 15, 2009.
发表日期	2011-08-03