年度	2011
全部作者	赵昌博
论文名称	Chun-Yin Tsai, Chi-Wei Chiu and Paul C.-P. Chao*, 2008, “Reliable hybrid fabrication processes for high sensitivity MEMS microphone,” The 34th International Conference on Micro and Nano Engineering, Hilton Athens, Greece, Sep. 15-18, 2008.
发表日期	2011-08-03