年度 2015
全部作者 邱俊诚
论文名称

Y. C. Hu, C. H. Chiang, K. H. Chen, C. T. Chiu, C. T. Chuang, W. Hwang, J.-C. Chiou, H. M. Tong, K. N. Chen, “Micro-masking Removal of TSV and Cavity during ICP Etching Using Parameter Control in 3D and MEMS Integrations”, The 7th IMPACT 2012 Conference, Taipei, Taiwan, Oct 24-26, 2012
发表日期 2015-06-12