年度 | 2012 |
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全部作者 | 邱俊诚 |
论文名称 | J. C. Chiou*, L. J. Shieh, and Y. J. Lin, “CMOS-MEMS Prestress Vertical Cantilever Resonator with Electrostatic Driving and Piezoresistive Sensing,” Journal of Physics D: Applied Physics, Vol. 41, No. 20, 2008, p. 205102. (97-2220-E-009-026) (EI, SCI, IF = 2.200, N/M = 15/94) |
发表日期 | 2012-12-05 |