年度 | 2011 |
---|---|
全部作者 | 趙昌博 |
論文名稱 | Chun-Yin Tsai, Chi-Wei Chiu and Paul C.-P. Chao*, 2008, “Reliable hybrid fabrication processes for high sensitivity MEMS microphone,” The 34th International Conference on Micro and Nano Engineering, Hilton Athens, Greece, Sep. 15-18, 2008. |
發表日期 | 2011-08-03 |