年度 | 2011 |
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全部作者 | 趙昌博 |
論文名稱 | Lun-De Liao, Paul C.-P. Chao, Yu-Jhu Lin, Chi-Wei Chiu, Shaou-Gang Miaou, Ming Chang and Jeng-Sheng Huang, “Precision Micro-/Nano- machining in a Scanning Electron Microscope by Run-to-Run Control Based on Image Feedbacks,” Best Student Paper Award of the Conference, The 16th Symposium on Nano-Device Technology, Apr, 2009, Hsinchu, Taiwan. |
發表日期 | 2011-08-03 |